JPH0430726U - - Google Patents

Info

Publication number
JPH0430726U
JPH0430726U JP7183990U JP7183990U JPH0430726U JP H0430726 U JPH0430726 U JP H0430726U JP 7183990 U JP7183990 U JP 7183990U JP 7183990 U JP7183990 U JP 7183990U JP H0430726 U JPH0430726 U JP H0430726U
Authority
JP
Japan
Prior art keywords
pattern
alignment
layer mask
alignment measurement
peripheral part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7183990U
Other languages
English (en)
Japanese (ja)
Other versions
JP2513540Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7183990U priority Critical patent/JP2513540Y2/ja
Publication of JPH0430726U publication Critical patent/JPH0430726U/ja
Application granted granted Critical
Publication of JP2513540Y2 publication Critical patent/JP2513540Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP7183990U 1990-07-05 1990-07-05 アライメント測定装置 Expired - Fee Related JP2513540Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7183990U JP2513540Y2 (ja) 1990-07-05 1990-07-05 アライメント測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7183990U JP2513540Y2 (ja) 1990-07-05 1990-07-05 アライメント測定装置

Publications (2)

Publication Number Publication Date
JPH0430726U true JPH0430726U (en]) 1992-03-12
JP2513540Y2 JP2513540Y2 (ja) 1996-10-09

Family

ID=31609233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7183990U Expired - Fee Related JP2513540Y2 (ja) 1990-07-05 1990-07-05 アライメント測定装置

Country Status (1)

Country Link
JP (1) JP2513540Y2 (en])

Also Published As

Publication number Publication date
JP2513540Y2 (ja) 1996-10-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees